Nanostage3D for metrology AFM

The Nanostage3D translation stage is developed within the Control Systems Technology group at the Technische Universiteit Eindhoven. It is an elastically guided, low hysteresis stage with a measurement volume of 1x1x1 mm and integrated interferometric displacement sensors. The stage measures ø250x190mm. The translation stage forms part of a metrological atomic force microscope (AFM) designed for the Dutch Metrology Institute VSL. This project is supported by Nanoned.

IME Technologies and the Technical Workshop of the TU/e (GTD) together have realized the electronic hardware and control platform for the Nanostage3D system. It is based on an EPIC single board computer and data-acquisition over a pc/104 bus together with custom designed current amplifiers and safety system. 

The Lorentz-type motors can be actuated with 18bit resolution and custom, differential interferometers (DPMI's) measure the translations of the stage via Zygo ZMI measurment electronics. The ZMI electronics are directly coupled to the data-acquisition hardware fot ultimate real-time performance.

The control and measurement applications can be designed and compiled directly in Matlab/Simulink^® and executed on the real-time platform on the EPIC board. The system is capable of performing its real-time task at a 10 kHz sample frequency and has a ultra low power consumption for using it in the cleanroom environment.

In 2011 IME Technologies will design and realize the control software and will also assist the implementation of the AFM measurement unit on top of the stage.

For more information about the Nanostage 3D visit the website.